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Journal of the Optical Society of America. A, Optics, Image Science, and Vision|January 7, 2017
Amplitude and phase beam shaping for highest sensitivity in sidewall angle detectionLuca Cisotto, H Paul Urbach
Applied Optics|July 14, 2016
Determination of the full scattering matrix using coherent Fourier scatterometryNitish Kumar, Luca Cisotto, Sarathi Roy, et al.
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