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Optics Express
|
June 16, 2015
Resolving capacity of the circular Zernike polynomials
M V Svechnikov, N I Chkhalo, M N Toropov, et al.
Optics Letters
|
February 14, 2015
Application of point diffraction interferometry for middle spatial frequency roughness detection
M V Svechnikov, N I Chkhalo, M N Toropov, et al.
The Review of Scientific Instruments
|
July 3, 2015
Sub-micrometer resolution proximity X-ray microscope with digital image registration
N I Chkhalo, A E Pestov, N N Salashchenko, et al.
Optics Express
|
October 12, 2022
Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm
V N Polkovnikov, R A Shaposhnikov, S Yu Zuev, et al.
Applied Optics
|
November 13, 2015
Application of point diffraction interferometry for measuring angular displacement to a sensitivity of 0.01 arcsec
D A Gavrilin, S V Kuzin, N N Salashchenko, et al.
The Review of Scientific Instruments
|
July 3, 2020
High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges
S A Garakhin, N I Chkhalo, I A Kas'kov, et al.
Optics Express
|
January 18, 2019
Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography
M V Svechnikov, N I Chkhalo, S A Gusev, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 7) with videos related to
Sort By:
Page
of 1
Optics Express
|
June 16, 2015
Resolving capacity of the circular Zernike polynomials
M V Svechnikov, N I Chkhalo, M N Toropov, et al.
Optics Letters
|
February 14, 2015
Application of point diffraction interferometry for middle spatial frequency roughness detection
M V Svechnikov, N I Chkhalo, M N Toropov, et al.
The Review of Scientific Instruments
|
July 3, 2015
Sub-micrometer resolution proximity X-ray microscope with digital image registration
N I Chkhalo, A E Pestov, N N Salashchenko, et al.
Optics Express
|
October 12, 2022
Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm
V N Polkovnikov, R A Shaposhnikov, S Yu Zuev, et al.
Applied Optics
|
November 13, 2015
Application of point diffraction interferometry for measuring angular displacement to a sensitivity of 0.01 arcsec
D A Gavrilin, S V Kuzin, N N Salashchenko, et al.
The Review of Scientific Instruments
|
July 3, 2020
High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges
S A Garakhin, N I Chkhalo, I A Kas'kov, et al.
Optics Express
|
January 18, 2019
Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography
M V Svechnikov, N I Chkhalo, S A Gusev, et al.
Page
of 1