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M-A Henn

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Applied Optics|October 24, 2012
Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometryH Gross, M-A Henn, S Heidenreich, et al.
Proceedings of Spie--The International Society for Optical Engineering|August 1, 2017
Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension TargetsB M Barnes, M-A Henn, M Y Sohn, et al.
Pageof 1

Showing results (1-10 of 2) with videos related to

Sort By:
Pageof 1
Applied Optics|October 24, 2012
Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometryH Gross, M-A Henn, S Heidenreich, et al.
Proceedings of Spie--The International Society for Optical Engineering|August 1, 2017
Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension TargetsB M Barnes, M-A Henn, M Y Sohn, et al.
Pageof 1