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Applied Optics
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October 24, 2012
Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry
H Gross, M-A Henn, S Heidenreich, et al.
Proceedings of Spie--The International Society for Optical Engineering
|
August 1, 2017
Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
B M Barnes, M-A Henn, M Y Sohn, et al.
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of 1
Search research articles
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Showing results (1-10 of 2) with videos related to
Sort By:
Page
of 1
Applied Optics
|
October 24, 2012
Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry
H Gross, M-A Henn, S Heidenreich, et al.
Proceedings of Spie--The International Society for Optical Engineering
|
August 1, 2017
Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
B M Barnes, M-A Henn, M Y Sohn, et al.
Page
of 1