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Analytical and Bioanalytical Chemistry|July 16, 2005
Analysis of ALD-processed thin films by ion-beam techniquesMatti Putkonen, Timo Sajavaara, Lauri Niinistö, et al.
ACS Omega|July 19, 2021
Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as PrecursorsSaba Ghafourisaleh, Georgi Popov, Markku Leskelä, et al.
Langmuir : the ACS Journal of Surfaces and Colloids|July 27, 2005
In situ quadrupole mass spectrometry study of atomic-layer deposition of ZrO2 using Cp2Zr(CH3)2 and waterJaakko Niinistö, Antti Rahtu, Matti Putkonen, et al.
Materials (Basel, Switzerland)|October 3, 2019
Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing TreatmentsMaksymilian Włodarski, Urszula Chodorow, Stanisław Jóźwiak, et al.
Physical Chemistry Chemical Physics : PCCP|August 22, 2022
Modelling atomic layer deposition overcoating formation on a porous heterogeneous catalystNiko Heikkinen, Juha Lehtonen, Laura Keskiväli, et al.
Applied Optics|October 3, 2013
Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer depositionTomohiro Ogawa, Yuichiro Ezoe, Teppei Moriyama, et al.
Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences|December 27, 2017
Low-temperature atomic layer deposition of SiO2/Al2O3 multilayer structures constructed on self-standing films of cellulose nanofibrilsMatti Putkonen, Perttu Sippola, Laura Svärd, et al.
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