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Chemosphere|November 19, 2023
Characteristics of inorganic acid emission from various generation semiconductor manufacturing factoriesMing-Peng Yeh, Lian-Fang Wu, En-Tsu Fan, et al.The Science of the Total Environment|August 29, 2025
Inorganic acid and ammonia emission factors in semiconductor processesFu-Yun Chen, Ming-Peng Yeh, Sher Ling Lee, et al.Pageof 1