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Journal of X-Ray Science and Technology|February 11, 2011
Wafer cost analysis for a soft x-ray projection lithography systemN M Ceglio, A M HawrylukJournal of X-Ray Science and Technology|February 11, 2011
Power loading limitations in soft x-ray projection lithographyA M Hawryluk, N M CeglioApplied Optics|September 22, 2010
Wavelength considerations in soft-x-ray projection lithographyA M Hawryluk, N M CeglioApplied Optics|September 22, 2010
Front-end design issues in soft-x-ray projection lithographyN M Ceglio, A M Hawryluk, G E SommargrenApplied Optics|April 17, 2010
Imaging x-ray spectrometer for laser fusion applicationsN M Ceglio, A M Hawryluk, R H PriceApplied Optics|January 15, 1983
Time-resolved x-ray transmission grating spectrometer for studying laser-produced plasmasN M Ceglio, R L Kauffman, A M Hawryluk, et al.Optics Letters|September 12, 2009
Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengthsN M Ceglio, A M Hawryluk, D G Stearns, et al.Applied Optics|September 22, 2010
Introduction to special issue of Applied Optics on soft-x-ray projection lithographyW T Silfvast, N M CeglioThe Review of Scientific Instruments|January 1, 1978
Micro-Fresnel zone plates for coded imaging applicationsN M Ceglio, H I SmithPageof 2