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Naiyuan Sheng

Showing results (1-10 of 4) with videos related to

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Optics Express|February 9, 2019
Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithmYiyu Sun, Naiyuan Sheng, Tie Li, et al.
Optics Express|January 16, 2019
A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial imageEnze Li, Yanqiu Li, Naiyuan Sheng, et al.
Optics Express|June 6, 2019
Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure fieldTie Li, Yiyu Sun, Enze Li, et al.
Applied Optics|June 4, 2019
Co-optimization method to reduce the pattern distortion caused by polarization aberration in anamorphic EUV lithographyNaiyuan Sheng, Yiyu Sun, Enze Li, et al.
Pageof 1

Showing results (1-10 of 4) with videos related to

Sort By:
Pageof 1
Optics Express|February 9, 2019
Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithmYiyu Sun, Naiyuan Sheng, Tie Li, et al.
Optics Express|January 16, 2019
A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial imageEnze Li, Yanqiu Li, Naiyuan Sheng, et al.
Optics Express|June 6, 2019
Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure fieldTie Li, Yiyu Sun, Enze Li, et al.
Applied Optics|June 4, 2019
Co-optimization method to reduce the pattern distortion caused by polarization aberration in anamorphic EUV lithographyNaiyuan Sheng, Yiyu Sun, Enze Li, et al.
Pageof 1