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Optics Express
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February 9, 2019
Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm
Yiyu Sun, Naiyuan Sheng, Tie Li, et al.
Optics Express
|
January 16, 2019
A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image
Enze Li, Yanqiu Li, Naiyuan Sheng, et al.
Optics Express
|
June 6, 2019
Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure field
Tie Li, Yiyu Sun, Enze Li, et al.
Applied Optics
|
June 4, 2019
Co-optimization method to reduce the pattern distortion caused by polarization aberration in anamorphic EUV lithography
Naiyuan Sheng, Yiyu Sun, Enze Li, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 4) with videos related to
Sort By:
Page
of 1
Optics Express
|
February 9, 2019
Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm
Yiyu Sun, Naiyuan Sheng, Tie Li, et al.
Optics Express
|
January 16, 2019
A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image
Enze Li, Yanqiu Li, Naiyuan Sheng, et al.
Optics Express
|
June 6, 2019
Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure field
Tie Li, Yiyu Sun, Enze Li, et al.
Applied Optics
|
June 4, 2019
Co-optimization method to reduce the pattern distortion caused by polarization aberration in anamorphic EUV lithography
Naiyuan Sheng, Yiyu Sun, Enze Li, et al.
Page
of 1