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Journal of the Optical Society of America. A, Optics, Image Science, and Vision|July 1, 2014
Profile reconstruction of periodic interfacePetr Melezhik, Anatoliy Poyedinchuk, Nataliya Yashina, et al.Journal of the Optical Society of America. A, Optics, Image Science, and Vision|March 5, 2013
Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratingsGérard Granet, Petr Melezhik, Kostyantyn Sirenko, et al.Pageof 1