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Scientific Reports|November 12, 2025

Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenanceNéstor Eduardo Sánchez-Arriaga, Ethan Canzini, Nathan John Espley-Plumb, et al.

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Scientific Reports|November 12, 2025

Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenanceNéstor Eduardo Sánchez-Arriaga, Ethan Canzini, Nathan John Espley-Plumb, et al.

Pageof 1