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P Famouri

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Optics Letters|July 30, 2003

Grating-enhanced through-wafer optical microprobe for microelectromechanical system high-resolution optical position feedbackJ M Dawson, L Wang, P Famouri, et al.

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Search research articles

Showing results (1-10 of 1) with videos related to

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Pageof 1

Optics Letters|July 30, 2003

Grating-enhanced through-wafer optical microprobe for microelectromechanical system high-resolution optical position feedbackJ M Dawson, L Wang, P Famouri, et al.

Pageof 1