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Applied Optics
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September 11, 2019
Automatic feature selection in EUV scatterometry
Paolo Ansuinelli, Wim M J Coene, H P Urbach
Applied Optics
|
July 17, 2020
Improved ptychographic inspection of EUV reticles via inclusion of prior information
Paolo Ansuinelli, Wim M J Coene, H Paul Urbach
Optics Express
|
August 13, 2025
Prior-primed deep neural network based EUV mask inspection
Paolo Ansuinelli, Suman Saha, Luis Felipe Barba Flores, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
Applied Optics
|
September 11, 2019
Automatic feature selection in EUV scatterometry
Paolo Ansuinelli, Wim M J Coene, H P Urbach
Applied Optics
|
July 17, 2020
Improved ptychographic inspection of EUV reticles via inclusion of prior information
Paolo Ansuinelli, Wim M J Coene, H Paul Urbach
Optics Express
|
August 13, 2025
Prior-primed deep neural network based EUV mask inspection
Paolo Ansuinelli, Suman Saha, Luis Felipe Barba Flores, et al.
Page
of 1