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ACS Applied Materials & Interfaces|October 12, 2021
Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-χ Block CopolymersGwenaelle Pound-Lana, Philippe Bézard, Camille Petit-Etienne, et al.
ACS Applied Materials & Interfaces|February 23, 2021
Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block CopolymersXavier Chevalier, Cindy Gomes Correia, Gwenaelle Pound-Lana, et al.
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