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Optics Letters|November 15, 2021
Silicon photonic microelectromechanical phase shifters for scalable programmable photonicsPierre Edinger, Alain Yuji Takabayashi, Carlos Errando-Herranz, et al.
Microsystems & Nanoengineering|July 11, 2025
Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry processYingying Li, Simon J Bleiker, Elliott Worsey, et al.
Nature Communications|June 6, 2023
Three-dimensional printing of silica glass with sub-micrometer resolutionPo-Han Huang, Miku Laakso, Pierre Edinger, et al.
Optics Express|February 24, 2023
Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phasePierre Edinger, Gaehun Jo, Chris Phong Van Nguyen, et al.
Microsystems & Nanoengineering|March 23, 2023
Integrated silicon photonic MEMSNiels Quack, Alain Yuji Takabayashi, Hamed Sattari, et al.
Microsystems & Nanoengineering|January 25, 2024
Correction: Integrated silicon photonic MEMSNiels Quack, Alain Yuji Takabayashi, Hamed Sattari, et al.
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