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Membranes
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April 21, 2022
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
Seong Ju Wi, Yong Ju Jang, Haneul Kim, et al.
Applied Optics
|
September 14, 2023
Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration
Dong Gi Lee, Seungchan Moon, Jinhyuk Choi, et al.
Membranes
|
January 21, 2023
Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane
Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, et al.
Membranes
|
August 25, 2023
Study on ZrSi<sub>2</sub> as a Candidate Material for Extreme Ultraviolet Pellicles
Seong Ju Wi, Won Jin Kim, Haneul Kim, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 4) with videos related to
Sort By:
Page
of 1
Membranes
|
April 21, 2022
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
Seong Ju Wi, Yong Ju Jang, Haneul Kim, et al.
Applied Optics
|
September 14, 2023
Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration
Dong Gi Lee, Seungchan Moon, Jinhyuk Choi, et al.
Membranes
|
January 21, 2023
Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane
Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, et al.
Membranes
|
August 25, 2023
Study on ZrSi<sub>2</sub> as a Candidate Material for Extreme Ultraviolet Pellicles
Seong Ju Wi, Won Jin Kim, Haneul Kim, et al.
Page
of 1