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Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
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August 14, 2025
Zirconium-Rich Strategy in Ultrathin Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> toward Back-End-of-Line-Compatible Ferroelectric Random Access Memory
Yinchi Liu, Jiajia Tao, Xiaoyu Dou, et al.
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Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
|
August 14, 2025
Zirconium-Rich Strategy in Ultrathin Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> toward Back-End-of-Line-Compatible Ferroelectric Random Access Memory
Yinchi Liu, Jiajia Tao, Xiaoyu Dou, et al.
Page
of 3