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Sensors (Basel, Switzerland)|January 11, 2022
True 3D Nanometrology: 3D-Probing with a Cantilever-Based SensorJan Thiesler, Thomas Ahbe, Rainer Tutsch, et al.
Sensors (Basel, Switzerland)|February 15, 2022
Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness MeasurementsMin Xu, Ziqi Zhou, Thomas Ahbe, et al.
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