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Applied Optics
|
October 2, 2010
Surface finish requirements for soft x-ray mirrors
D L Windt, W K Waskiewicz, J E Griffith
Applied Optics
|
September 22, 2010
Mask technologies for soft-x-ray projection lithography at 13 nm
D M Tennant, L A Fetter, L R Harriott, et al.
Optics Letters
|
September 22, 2009
Soft-x-ray projection lithography: printing of 0.2-microm features using a 20:1 reduction
D W Berreman, J E Bjorkholm, L Eichner, et al.
Optics Letters
|
September 25, 2009
Diffraction-limited soft-x-ray projection imaging using a laser plasma source
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Applied Optics
|
September 22, 2010
Soft-x-ray projection imaging with a 1:1 ring-field optic
A A Macdowell, J E Bjorkholm, K Early, et al.
Applied Optics
|
September 22, 2010
Soft-x-ray projection lithography experiments using Schwarzschild imaging optics
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 6) with videos related to
Sort By:
Page
of 1
Applied Optics
|
October 2, 2010
Surface finish requirements for soft x-ray mirrors
D L Windt, W K Waskiewicz, J E Griffith
Applied Optics
|
September 22, 2010
Mask technologies for soft-x-ray projection lithography at 13 nm
D M Tennant, L A Fetter, L R Harriott, et al.
Optics Letters
|
September 22, 2009
Soft-x-ray projection lithography: printing of 0.2-microm features using a 20:1 reduction
D W Berreman, J E Bjorkholm, L Eichner, et al.
Optics Letters
|
September 25, 2009
Diffraction-limited soft-x-ray projection imaging using a laser plasma source
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Applied Optics
|
September 22, 2010
Soft-x-ray projection imaging with a 1:1 ring-field optic
A A Macdowell, J E Bjorkholm, K Early, et al.
Applied Optics
|
September 22, 2010
Soft-x-ray projection lithography experiments using Schwarzschild imaging optics
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Page
of 1