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Optics Express|December 19, 2025
Dynamic compensation of modulation aberration of high-aspect-ratio composite trenches via BP neural network for topography measurementXiao Huo, Shumin Wang, Zhishan Gao, et al.Sensors (Basel, Switzerland)|July 12, 2025
Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning InterferometryWenyou Qiao, Zhishan Gao, Qun Yuan, et al.Optics Express|January 29, 2025
Research on the modulation aberration numerical correction method of interference signals for high aspect ratio samples utilizing coherence scanning interferometryWenyou Qiao, Zhishan Gao, Dan Zhu, et al.Optics Express|November 14, 2024
Topography reconstruction of high aspect ratio silicon trench array via near-infrared coherence scanning interferometryJianqiu Ma, Xiao Huo, Jiale Zhang, et al.Pageof 1