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Microsystems & Nanoengineering
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May 10, 2024
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator
Cheng Tu, Xu-Heng Ou-Yang, Ying-Jie Wu, et al.
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of 1
Search research articles
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Showing results (1-10 of 1) with videos related to
Sort By:
Page
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Microsystems & Nanoengineering
|
May 10, 2024
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator
Cheng Tu, Xu-Heng Ou-Yang, Ying-Jie Wu, et al.
Page
of 1