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Optics Express
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October 12, 2022
High-precision lithography thick-mask model based on a decomposition machine learning method
Ziqi Li, Lisong Dong, Xuyu Jing, et al.
Applied Optics
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September 14, 2023
Fast diffraction model of an EUV mask based on asymmetric patch data fitting
Ziqi Li, Xuyu Jing, Lisong Dong, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 2) with videos related to
Sort By:
Page
of 1
Optics Express
|
October 12, 2022
High-precision lithography thick-mask model based on a decomposition machine learning method
Ziqi Li, Lisong Dong, Xuyu Jing, et al.
Applied Optics
|
September 14, 2023
Fast diffraction model of an EUV mask based on asymmetric patch data fitting
Ziqi Li, Xuyu Jing, Lisong Dong, et al.
Page
of 1