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Optics Letters|April 3, 2014
250 nm period grating transferred by proximity i-line mask-aligner lithographyYannick Bourgin, Thomas Käsebier, Uwe D ZeitnerOptics Letters|September 29, 2017
175 nm period grating fabricated by i-line proximity mask-aligner lithographyYannick Bourgin, Daniel Voigt, Thomas Käsebier, et al.Optics Letters|November 21, 2012
Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithographyFabrice Stehlin, Yannick Bourgin, Arnaud Spangenberg, et al.Optics Express|July 21, 2015
Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithographyYannick Bourgin, Thomas Siefke, Thomas Käsebier, et al.Optics Express|July 1, 2010
100 nm period grating by high-index phase-mask immersion lithographyYannick Bourgin, Yves Jourlin, Olivier Parriaux, et al.Pageof 1