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Yasushi Tauchi

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The Review of Scientific Instruments|March 5, 2008
Efficient negative ion production in rf plasmas using a mesh grid bias methodJunichi Okada, Yuichi Nakao, Yasushi Tauchi, et al.
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The Review of Scientific Instruments|March 5, 2008
Efficient negative ion production in rf plasmas using a mesh grid bias methodJunichi Okada, Yuichi Nakao, Yasushi Tauchi, et al.
Pageof 1