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Micromachines|April 26, 2025
A Trimming Strategy for Mass Defects in Hemispherical Resonators Based on Multi-Harmonic AnalysisYimo Chen, Fanrui Kong, Kai Zeng, et al.Microsystems & Nanoengineering|April 23, 2025
Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrateYimo Chen, Yan Shi, Xiang Xi, et al.Pageof 1