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Optics Express|September 13, 2019
Inducing lasing in organic materials with low optical gain by three-dimensional plasmonic nanocavity arraysChunrui Han, Yuejing Qi, Yu Wang, et al.
Applied Optics|August 12, 2025
High-power excimer laser homogenization using dual-microlens arraysZhiyuan Shen, Yuejing Qi, Shuman Yang, et al.
Optics Express|March 17, 2021
Source mask optimization for extreme-ultraviolet lithography based on thick mask model and social learning particle swarm optimization algorithmZinan Zhang, Sikun Li, Xiangzhao Wang, et al.
Applied Optics|March 17, 2026
Analysis of laser-induced damage effects on lithographic illumination pupil-fill characteristicsShuman Yang, Yuejing Qi, Zhiyuan Shen, et al.
Optics Express|December 19, 2025
Analytical model of excimer laser homogenizer using dual-microlens arraysZhiyuan Shen, Yuejing Qi, Shuman Yang, et al.
Optics Express|May 4, 2026
Design based on a hybrid PSO-GWO algorithm and tolerance analysis of a random phase plateZhiyuan Shen, Yuejing Qi, Shuman Yang, et al.
Optics Express|July 30, 2025
Modeling and evaluation for the infrared suppression ratio of an EUV collector with integrated spectral purity filtersHao Jin, Yuejing Qi, Ziang Zhao, et al.
Micromachines|August 28, 2025
Investigation and Application of Key Alignment Parameters for Overlay Accuracy in 3D StructuresMiao Jiang, Mingyi Yao, Ganlin Song, et al.
Optics Express|February 20, 2026
Multiscale measurement for infrared suppression ratio of SPFs-integrated EUV collectors by a weighted harmonic mean integralHao Jin, Yuejing Qi, Jing Ma, et al.
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