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Optics Express
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July 2, 2026
Multi-mode interferometry for measuring the depth of deep silicon-etched microstructures
Yunzhu Yue, Xingjian Jiang, Guannan Li, et al.
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Search research articles
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Showing results (1-10 of 1) with videos related to
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Page
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Optics Express
|
July 2, 2026
Multi-mode interferometry for measuring the depth of deep silicon-etched microstructures
Yunzhu Yue, Xingjian Jiang, Guannan Li, et al.
Page
of 1