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The Review of Scientific Instruments|March 6, 2014
Ion sources for ion implantation technology (invited)Shigeki Sakai, Nariaki Hamamoto, Yutaka Inouchi, et al.
The Review of Scientific Instruments|March 6, 2014
Multi-cusp ion source for doping process of flat panel display manufacturingYutaka Inouchi, Takeshi Matsumoto, Shojiro Dohi, et al.
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