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Applied Optics|September 11, 2019
Reconstruction of a complex profile shape by weighting basic characterization results for nanometrologyMoustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, et al.
Applied Optics|October 6, 2021
Experimental identification of a grating profile using neural network classifiers in optical scatterometryMoustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, et al.
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