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Optics Express|November 11, 2025
3D reconstruction of SEM images based on point cloud sampling and conditional generative adversarial networksGe Liu, Libin Zhang, Zitao Wei, et al.
Nanotechnology|October 13, 2025
Effective intra-field overlay compensation in lithography via mask-level thermal and mechanical controlDinghai Rui, Libin Zhang, Yayi Wei, et al.
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