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Micromachines|September 27, 2025
Study on Nano-Grinding Characteristics and Formation Mechanism of Subsurface Damage in Monocrystalline SiliconHaipeng Yan, Haining Zhang, Siyuan Cao, et al.
Micromachines|September 27, 2025
Non-Invasive Three-Dimensional Cell Manipulation Technology Based on Acoustic Microfluidic ChipsLin Lin, Yiming Zhen, Wang Li, et al.
Micromachines|September 27, 2025
Variational Bayesian Innovation Saturation Kalman Filter for Micro-Electro-Mechanical System-Inertial Navigation System/Polarization Compass Integrated NavigationYu Sun, Xiaojie Liu, Xiaochen Liu, et al.
Micromachines|September 27, 2025
A Wideband D-Band Frequency Sextupler Chain with High Harmonic Rejection in 100 nm GaAs pHEMT TechnologyPinqing Wang, Zhe Chen, Yubin Guo, et al.
Micromachines|September 27, 2025
Design and Research of Superimposed Force SensorGenshang Wu, Jinggan Shao, Yicun Xu, et al.
Micromachines|September 27, 2025
Development and Test of a Novel High-Precision Inchworm Piezoelectric MotorNan Huang, Jiahao Yin, Fuyuan Feng, et al.
Micromachines|June 18, 2020
Dual-Mass MEMS Gyroscope Parallel Denoising and Temperature Compensation Processing Based on WLMP and CS-SVRLongkang Chang, Huiliang Cao, Chong Shen
Micromachines|June 18, 2020
The Relationships of Microscopic Evolution to Resistivity Variation of a FIB-Deposited Platinum InterconnectorChaorong Zhong, Ruijuan Qi, Yonghui Zheng, et al.
Micromachines|June 18, 2020
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A ReviewLucia Romano, Marco Stampanoni
Micromachines|May 28, 2020
Investigation on Threshold Voltage Adjustment of Threshold Switching Devices with HfO2/Al2O3 Superlattice on Transparent ITO/Glass SubstrateYejoo Choi, Jaemin Shin, Seungjun Moon, et al.
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