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Micromachines|November 27, 2024
ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range DetectionShutao Yao, Wenling Shang, Guifeng Ta, et al.
Micromachines|October 26, 2024
A Novel Sensing Method to Detect Malachite Green Contaminant on Silicon Substrate Using Nonlinear OpticsMuhammad Ahyad, Hendradi Hardhienata, Eddwi Hesky Hasdeo, et al.
Micromachines|October 26, 2024
Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet EtchingQihui Yu, Henk-Willem Veltkamp, Remco J Wiegerink, et al.
Micromachines|October 26, 2024
Air Leakages at Microvalves: Pressure Decay Measurements and Extended Continuum Modelling of Knudsen FlowsDaniel Anheuer, Johannes Schwarz, Patrick Debera, et al.
Micromachines|October 26, 2024
Design and Manufacture of 30-Degree Projection Lens for Augmented Reality WaveguideWen-Shing Sun, Ying-Shun Hsu, Chuen-Lin Tien, et al.
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