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Micromachines|November 27, 2025
Theoretical and Experimental Investigation on the Nanostructures Evolution on Pre-Patterned Fused Silica by Focused Ion BeamJianwei Ji, Yangsen Luo, Shaosen Liang, et al.
Micromachines|November 27, 2025
Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride ProtectionChengwei Xian, Pengju Kuang, Ning Fu, et al.
Micromachines|November 27, 2025
Mechanism of a Composite Energy Field for Inhibiting Damage in High-Silicon Aluminum Alloy During Micro-TurningJiaxin Zhao, Yan Gu, Yamei Liu, et al.
Micromachines|November 27, 2025
Impact of Phase Defects on the Aerial Image in High NA Extreme Ultraviolet LithographyKun He, Zhinan Zeng
Micromachines|November 27, 2025
In Situ Raman Measurement of the Growth of SiCOH Thin Film Using Hexamethyl-Disiloxane (HMDSO) Mixture Source in Semiconductor InterconnectionHwa Rim Lee, Tae Min Choi, Sung Gyu Pyo
Micromachines|January 28, 2026
Magnetically Sculpted Microfluidics for Continuous-Flow Fractionation of Cell Populations by EpCAM Expression LevelZhenwei Liang, Xiaolei Guo, Xuanhe Zhang, et al.
Micromachines|January 28, 2026
Hardware-Oriented Approximations of Softmax and RMSNorm for Efficient Transformer InferenceYiwen Kang, Dong Wang
Micromachines|January 28, 2026
Fabrication and Drag Reduction Performance of Flexible Bio-Inspired Micro-Dimple FilmYini Cai, Yanjun Lu, Haopeng Gan, et al.
Micromachines|January 28, 2026
Near-Field Electrospray ZnO Thin Film for Ultraviolet PhotodetectorsLiyun Zhuo, Tao Peng, Jiaxin Jiang, et al.
Micromachines|January 28, 2026
Microneedle Technologies for Drug Delivery: Innovations, Applications, and Commercial ChallengesKranthi Gattu, Deepika Godugu, Harsha Jain, et al.
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