Sergey Zaitsev
3PUBLICATIONS
6CO-AUTHORS
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Publications (3)
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|Jan 28, 2026
Comprehensive Investigation of the Commercial ELP-20 Electron-Beam Lithography Resist.Meruert Qairat, Aliya Alzhanova, Mustakhim Pshikov
|Aug 28, 2025
Sensitivity and Contrast Characterization of PMMA 950K Resist Under 30 keV Focused Ga+ Ion Beam Exposure.Mukhit Muratov, Yana Shabelnikova, Sergey Zaitsev
|Jun 10, 2022
Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment.Alexander A Svintsov, Maxim A Knyazev, Sergey I Zaitsev
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