Junqing Liu
2PUBLICATIONS
0CO-AUTHORS
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Publications (2)
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|May 09, 2019
Structure and Dielectric Property of High-k ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone.Junqing Liu, Junpeng Li, Jianzhuo Wu
|Mar 05, 2019
Effect of Composition, Interface, and Deposition Sequence on Electrical Properties of Nanolayered Ta2O5-Al2O3 Films Grown on Silicon by Atomic Layer Deposition.Junpeng Li, Jianzhuo Wu, Junqing Liu
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