Jean-François de Marneffe

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1CO-AUTHORS
Compound semiconductors
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Publications (1)

|Nov 29, 2018
Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer.

Jean-François de Marneffe, Boon Teik Chan, Martin Spieser

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Frequent Collaborators

1 joint publications

Armin W Knoll