Ivan Zyulkov
1PUBLICATIONS
0CO-AUTHORS
Get your video featured.
Publish with JoVEGet your video featured.
Publish with JoVE
Publications (1)
Sort by Publication Date:
|Aug 19, 2017
Selective Ru ALD as a Catalyst for Sub-Seven-Nanometer Bottom-Up Metal Interconnects.Ivan Zyulkov, Mikhail Krishtab, Stefan De Gendt
Pageof 1