Mario Mäkinen
2PUBLICATIONS
2CO-AUTHORS
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Publications (2)
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|May 19, 2025
Modelling of growth reaction pathways of zincone ALD/MLD hybrid thin films: a DFT study of precursor screening and the diethyl zinc pulse.Mario Mäkinen, Kari Laasonen
|Jun 11, 2024
Modelling the growth reaction pathways of zincone ALD/MLD hybrid thin films: a DFT study.Mario Mäkinen, Timo Weckman, Kari Laasonen
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