Olaf C A Bolkenbaas

1PUBLICATIONS
5CO-AUTHORS
Chemical and thermal processes in energy and combustion
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Publications (1)

|Jul 28, 2025
Area-Selective Atomic Layer Deposition through Selective Passivation of SiO2 with a SF6/H2 Plasma.

Olaf C A Bolkenbaas, Marc J M Merkx, Nicholas J Chittock

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