Antoine Pacco
2PUBLICATIONS
6CO-AUTHORS
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Publications (2)
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|Oct 23, 2024
Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions.Kerong Deng, Ivan Erofeev, Angshuman Ray Chowdhuri
|Aug 21, 2019
Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchants.Antoine Pacco, Zheng Tao, Jens Rip
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