Geun Young Yeom
3PUBLICATIONS
1CO-AUTHORS
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Publications (3)
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|Nov 22, 2021
Reduction of EUV resist damage by neutral beam etching.Gyo Wun Kim, Won Jun Chang, Ji Eun Kang
|Nov 12, 2020
Etch characteristics of magnetic tunnel junction materials using H2/NH3 reactive ion beam.Ju Eun Kim, Doo San Kim, You Jung Gill
|Sep 17, 2020
Characteristics of silicon nitride deposited by very high frequency (162 MHz)-plasma enhanced atomic layer deposition using bis(diethylamino)silane.J Y Byun, Y J Ji, K H Kim
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