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Fulin Wang, Glenn H Balbus, Shuozhi Xu+10
Fulin Wang
Glenn H Balbus
Shuozhi Xu
Yanqing Su
Jungho Shin
Keith E Knipling
Leah H Mills
Irene J Beyerlein
Tresa M Pollock
Daniel S Gianola
Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on : Jul 17, 2020