Shake Karapetyan

1PUBLICATIONS
2CO-AUTHORS
Photonic and electro-optical devices, sensors and systems (excl. communications)
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Publications (1)

|Feb 23, 2026
3D atomic-scale metrology of strain relaxation and roughness in Gate-All-Around transistors via electron ptychography.

Shake Karapetyan, Steven E Zeltmann, Glen Wilk

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