Xavier Chevalier
2PUBLICATIONS
3CO-AUTHORS
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Publications (2)
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|Oct 12, 2021
Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-χ Block Copolymers.Gwenaelle Pound-Lana, Philippe Bézard, Camille Petit-Etienne
|Feb 23, 2021
Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers.Xavier Chevalier, Cindy Gomes Correia, Gwenaelle Pound-Lana
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