Junpei Sakurai

1PUBLICATIONS
0CO-AUTHORS
Microelectromechanical systems (MEMS)
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Publications (1)

|Dec 09, 2023
The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based Thin Film Metallic Glass with Structural Relaxation by Heat Treatment.

Hodaka Otsuka, Takafumi Ninoseki, Chiemi Oka

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