Yury Zhidik

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0CO-AUTHORS
Organometallic chemistry
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Publications (1)

|Dec 24, 2021
The Method of Low-Temperature ICP Etching of InP/InGaAsP Heterostructures in Cl2-Based Plasma for Integrated Optics Applications.

Sergey Ishutkin, Vadim Arykov, Igor Yunusov

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