Min Kyun Sohn

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1CO-AUTHORS
Elemental semiconductors
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Publications (1)

|Jan 07, 2026
Scalable Isotropic Atomic Layer Etching of SiO<sub>2</sub> via Thermo-Radical Activation.

Min Kyun Sohn, Jieun Kim, Seong Hyun Lee

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Frequent Collaborators

1 joint publications

Jieun Kim