James R Engstrom
3PUBLICATIONS
6CO-AUTHORS
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Publications (3)
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|Mar 20, 2024
Effect of Co-Reactants on Interfacial Oxidation in Atomic Layer Deposition of Oxides on Metal Surfaces.Jay V Swarup, Heng-Ray Chuang, Amy L You
|Oct 29, 2020
A Vacuum Ultraviolet-Enhanced Oxidation Mechanism for Pd: Near-Surface Oxidation for Atomic Layer Etching.Brennan M Coffey, Himamshu C Nallan, James R Engstrom
|Feb 12, 2020
Competitive Adsorption as a Route to Area-Selective Deposition.Taewon Suh, Yan Yang, Pengyuan Zhao
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