Panni Wang
1PUBLICATIONS
3CO-AUTHORS

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Publications (1)
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|Jul 15, 2020
Direct comparison of ferroelectric properties in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> between thermal and plasma-enhanced atomic layer deposition.Jae Hur, Nujhat Tasneem, Gihun Choe
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