Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Rui Su

1PUBLICATIONS
0CO-AUTHORS
Experimental methods in fluid flow, heat and mass transfer
Featured researcher

Get your video featured.

JoVEPublish with JoVE
Featured researcher

Get your video featured.

JoVEPublish with JoVE
Journal

Publications (1)

Sort by Publication Date:
|Mar 28, 2026
A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment.

Jiefeng Peng, Liang Hu, Rui Su

Pageof 1

Frequent Collaborators

Frequent Collaborators

Top Related Videos

Fabrication and Testing of Photonic Thermometers
08:44

Fabrication and Testing of Photonic Thermometers

Published on : Oct 24, 2018

6.4K
See more related videos

Top Related Videos

Fabrication and Testing of Photonic Thermometers
08:44

Fabrication and Testing of Photonic Thermometers

Published on : Oct 24, 2018

6.4K
See more related videos