Chaowei Si
3PUBLICATIONS
1CO-AUTHORS
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Publications (3)
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|Feb 27, 2026
A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure.Zihan Wang, Chaowei Si, Jihua Zhang
|Jun 28, 2023
A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy.Zhongxuan Hou, Yongkang Zhang, Chaowei Si
|Feb 25, 2023
Effects of Mask Material on Lateral Undercut of Silicon Dry Etching.Yongkang Zhang, Zhongxuan Hou, Chaowei Si
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