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Chaowei Si

3PUBLICATIONS
1CO-AUTHORS
Photovoltaic devices (solar cells)Metals and alloy materialsProcess control and simulation
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Publications (3)

Sort by Publication Date:
|Feb 27, 2026
A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure.

Zihan Wang, Chaowei Si, Jihua Zhang

|Jun 28, 2023
A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy.

Zhongxuan Hou, Yongkang Zhang, Chaowei Si

|Feb 25, 2023
Effects of Mask Material on Lateral Undercut of Silicon Dry Etching.

Yongkang Zhang, Zhongxuan Hou, Chaowei Si

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Frequent Collaborators

1 joint publications

Zhongxuan Hou

Frequent Collaborators

1 joint publications

Zhongxuan Hou

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