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Jie Li

1PUBLICATIONS

0CO-AUTHORS

Solid state chemistry

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|Jun 02, 2021

Ion-Enhanced Etching Characteristics of sp<sup>2</sup>-Rich Hydrogenated Amorphous Carbons in CF<sub>4</sub> Plasmas and O<sub>2</sub> Plasmas.

Jie Li, Yongjae Kim, Seunghun Han

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